首页|Patent Issued for Transport carrier, deposition apparatus, and electronic device manufacturing apparatus (USPTO 12116664)
Patent Issued for Transport carrier, deposition apparatus, and electronic device manufacturing apparatus (USPTO 12116664)
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From the background information supplied by the inventors, news correspondents o btained the following quote: “Field of the Invention “The present invention relates to a transport carrier, a deposition apparatus, a nd an apparatus for manufacturing electronic devices.“Description of the Related Art “Conventionally, deposition apparatuses for forming a film by depositing a depos ition material on a film formation target such as a glass substrate are used and , for example, organic layer deposition apparatuses for depositing organic layer s when an organic EL panel is manufactured are known.Such deposition apparatuse s include a cluster type deposition apparatus and an in-line type deposition app aratus.In a cluster type deposition apparatus, a plurality of deposition chambe rs in which film formation is performed on a glass substrate are arranged in a c luster form and a glass substrate is sequentially transported to the respective deposition chambers such that a plurality of layers are deposited thereon.On th e other hand, in an in-line type deposition apparatus, film formation is perform ed on a glass substrate for film formation in a deposition chamber while the gla ss substrate is linearly transported.In the in-line type, a plurality of deposi tion chambers may be provided in a linear direction.
BusinessCanon Tokki CorporationEmerg ing TechnologiesMachine LearningRobotRobotics
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