Abstract
From the background information supplied by the inventors, news correspondents o btained the following quote: “BACKGROUND ART “Conventionally, robot control devices for controlling operation of a robot which transfers a substrate while holding the substrate, are known. Patent Document 1 discloses a substrate transferring device as one example of such robot control devices. “The substrate transferring device of Patent Document 1 is provided with a housi ng, and a robotic arm provided to an upper surface of the housing. The robotic a rm is provided with an upper arm attached to the upper surface of the housing, a forearm attached to a tip end of the upper arm, and an end effector attached to a tip end of the forearm. Moreover, a substrate aligner is provided with a base part, a substrate holding part attached to the base part, and a sensor which de tects a characteristic part (e.g., a notch) of the substrate. The base part and the substrate holding part of the substrate aligner, and the substrate held by the substrate holding part pass through substrate holding teeth of the end effect or.”
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