Abstract
The following quote was obtained by the news editors from the background informa tion supplied by the inventors: “Cassettes which accommodate a plurality of subs trates may be transferred in a substrate processing apparatus by a cassette hand ler which may transfer cassettes between a cassette in-out port, a cassette stat ion and/or a storage device. The storage device may comprise a cassette storage carousel for storing a plurality of cassettes. A substrate handling robot may be constructed and arranged to transfer substrates from a cassette at the cassette station to a substrate boat to fill the boat with multiple substrates.
NETL
NSTL