首页|Research on Robotics Reported by a Researcher at Macau University of Science and Technology (Scheduling Cluster Tools with Multi-Space Process Modules and a Mul ti-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constra ints)
Research on Robotics Reported by a Researcher at Macau University of Science and Technology (Scheduling Cluster Tools with Multi-Space Process Modules and a Mul ti-Finger-Arm Robot in Wafer Fabrication Subject to Wafer Residency Time Constra ints)
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By a News Reporter-Staff News Editor at Robotics & Machine Learning DailyNews Daily News-New study results on robotics have bee n published. According to news originating fromMacao, People's Republic of Chin a, by NewsRx correspondents, research stated, "To increase productivity,more so phisticated cluster tools are developed. To achieve this, one of the ways is to increase the numberof spaces in a process module (PM) and the number of fingers on a robot arm as well, leading to a clustertool with multi-space PMs and a mu lti-finger-arm robot."Funders for this research include Science And Technology Development Fund (Fdct) , Macau Sar.The news editors obtained a quote from the research from Macau University of Sci ence and Technology:"This paper discusses the scheduling problem of cluster too ls with four-space PMs and a four-finger-armrobot, a typical tool with multi-sp ace PMs and a multi-finger-arm robot adopted in modern fabs. With twoarms in su ch a tool, one is used as a clean one, while the other is used as a dirty one. I n this way, waferquality can be improved. However, scheduling such cluster tool s to ensure the residency time constraintsis very challenging, and there is no research report on this issue. This article conducts an in-depth analysisof the steady-state scheduling for this type of cluster tools to explore the effect of different schedulingstrategies. Based on the properties, four robot task seque nces are presented as scheduling strategies.With them, four linear programming models are developed to optimize the cycle time of the system andfind feasible schedules."
Macau University of Science and Technolo gyMacaoPeople's Republic of ChinaAsiaEmerging TechnologiesMachine Lear ningRobotRobotics
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