From the background information supplied by the inventors, news correspondents o btained the followingquote: “BACKGROUND ART“Conventionally, there has been a known transfer robot that transfers a substrat e. PTL 1 discloses atransfer apparatus comprising a transfer robot, which is a robot of this type.“The transfer robot of PTL 1 includes a body and an arm. The arm is installed at the top of the body.The transfer robot transfers the substrate (workpiece) bet ween a cassette (storage apparatus) and variousprocessing apparatuses or the li ke by extending and retracting the arm. An end effector that holds thesubstrate is installed to the distal end of the arm.”
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