Robotics & Machine Learning Daily News2024,Issue(Nov.18) :143-146.

Researchers Submit Patent Application, 'Dummy Die Material Selection And Positio ning For Bonding Processes', for Approval (USPTO 20240363445)

研究人员提交专利申请“粘合工艺的虚拟模具材料选择和定位”(USPTO 20240363445)以供批准

Robotics & Machine Learning Daily News2024,Issue(Nov.18) :143-146.

Researchers Submit Patent Application, 'Dummy Die Material Selection And Positio ning For Bonding Processes', for Approval (USPTO 20240363445)

研究人员提交专利申请“粘合工艺的虚拟模具材料选择和定位”(USPTO 20240363445)以供批准

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摘要

新闻编辑从发明人提供的背景信息中获得了以下引文:为了形成处理电路或逻辑电路和类似的集成芯片结构,单个芯片是单片化和键合的TO键合晶片。接着,接合晶片可以进行进一步的加工例如需要后续平坦化的间隙填充工艺等。调查人员观察到随后的工艺通常受到模具高度、模具放置和模具的显著影响在晶片中心和晶片边缘的结合晶片上的密度。

Abstract

News editors obtained the following quote from the background information suppli ed by the inventors:“In order to form processing circuits or logic circuits and similar integrated chip structures, individual diesare singulated and bonded t o bonding wafers. The bonding wafers may then undergo further processingsuch as gapfill processes which require subsequent planarization and the like. The inve ntor has observedthat the subsequent processes are often substantially impacted by the die height, die placement, and diedensity on the bonding wafer, both at wafer center and wafer edge.

Key words

Cyborgs/Emerging Technologies/Machine Learning/Patent Application

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出版年

2024
Robotics & Machine Learning Daily News

Robotics & Machine Learning Daily News

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