首页|Researchers Submit Patent Application, 'Increased Number Of Load Ports On Factor y Interface With Robot That Moves On Track', for Approval (USPTO 20240375300)
Researchers Submit Patent Application, 'Increased Number Of Load Ports On Factor y Interface With Robot That Moves On Track', for Approval (USPTO 20240375300)
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News editors obtained the following quote from the background information suppli ed by the inventors:“Electronic device manufacturing systems may include multip le process chambers arranged around amainframe housing having a transfer chambe r and one or more load lock chambers configured to passsubstrates into the tran sfer chamber. These systems may employ a transfer robot, which may be housedin the transfer chamber, for example. The transfer robot may be a selectively compl iant articulated robotarm (SCARA) robot or the like, and may be adapted to tran sport substrates between the various processingchambers and one or more load lo ck chambers. For example, the transfer robot may transport substratesfrom proce ss chamber to process chamber, from load lock chamber to process chamber, and vi ce versa.