摘要
新闻编辑从发明人提供的背景信息中获得了以下引文：电子设备制造系统可包括多个布置在主机壳体，其具有传送腔R和一个或多个配置成通过基板进入传送室。这些系统可以采用传送机器人，该传送机器人可以容纳例如在传送室中。所述转移机器人可以是选择性地移动的铰接机器人臂(SCARA)机器人等，并可适于在各种加工之间传送运动基板腔室和一个或多个负载低压腔室。例如，传送机器人可以传送基板从工艺室到工艺室，从负载锁闭室到工艺室，反之亦然。
Abstract
News editors obtained the following quote from the background information suppli ed by the inventors:“Electronic device manufacturing systems may include multip le process chambers arranged around amainframe housing having a transfer chambe r and one or more load lock chambers configured to passsubstrates into the tran sfer chamber. These systems may employ a transfer robot, which may be housedin the transfer chamber, for example. The transfer robot may be a selectively compl iant articulated robotarm (SCARA) robot or the like, and may be adapted to tran sport substrates between the various processingchambers and one or more load lo ck chambers. For example, the transfer robot may transport substratesfrom proce ss chamber to process chamber, from load lock chamber to process chamber, and vi ce versa.
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