首页|A Novel On-Site Primary Accelerometer Calibration Method Based on Homodyne Self-Traceable Grating Interferometer

A Novel On-Site Primary Accelerometer Calibration Method Based on Homodyne Self-Traceable Grating Interferometer

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  • NETL
  • NSTL
  • IEEE
As a key component in motion state sensing, the accuracy of accelerometers directly affects the performance and safety of their systems. However, their sensitivity can be influenced due to various factors during operation, necessitating both pre-deployment and periodic calibration. Traditional primary calibration methods rely on laser interferometers, yet their trueness and stability are compromised by environmental disturbances affecting the laser wavelength, making on-site traceability challenging. Addressing these issues, this study combines a Cr self-traceable grating with a homodyne Littrow grating interferometer and primary vibration calibration technique. Leveraging the high line density, stability, and traceability of the self-traceable grating, it achieves high accuracy and on-site traceable calibration. In experiments, the effectiveness of this calibration system was validated using commercial accelerometers, achieving a measurement uncertainty of 0.25%. This calibration technique not only enhances the accuracy and environmental adaptability of accelerometer calibration but also addresses the critical issue of on-site traceability, representing the future direction of in-field accelerometer calibration.

GratingsCalibrationAccelerometersMeasurement by laser beamAccuracyLaser beamsAtomic beamsAtomic layer depositionAtomic measurementsDisplacement measurement

Zhikun Chang、Xiao Deng、Haoran Zhang、Xiaoling Han、Xiaoyu Shen、Pengfei Niu、Jing Yu、Song Song、Xinbin Cheng、Zhoumiao Shi、Lifeng Duan、Gang Sun、Tongbao Li

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School of Physics Science and Engineering, Tongji University, Shanghai, China|National Metrology and Testing Center for Integrated Circuit Measurement and Inspection Equipment Industry (Shanghai), Shanghai, China

State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, China

College of Metrology and Testing Engineering, China Jiliang University, Hangzhou, China

School of Computer Science and Technology, Zhejiang University of Water Resources and Electric Power, Hangzhou, China

Shenzhen Institute of Technology Innovation, NIM, Shenzhen, China

Shanghai Yuwei Semiconductor Technology Company Ltd., Shanghai, China

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2025

10.1109/TIM.2025.3555720

IEEE transactions on instrumentation and measurement

IEEE transactions on instrumentation and measurement

SCI
ISSN：
年,卷(期)：2025.74(1)
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