首页|Patent Issued for Charged particle emission device, system, method, and program (USPTO 12154762)
Patent Issued for Charged particle emission device, system, method, and program (USPTO 12154762)
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Reporters obtained the following quote from the background information supplied by the inventors:“BACKGROUND ART“In recent years, a technique for emitting charged particles such as ions has be come widely used invarious fields. As an example of the device, there is a stat ic eliminator of static electricity. The staticeliminator is a device for neutr alizing electrification charge by emitting, to a charged object, ions chargedpo sitively or negatively by corona discharge (for example, Patent Literature 1). T he static eliminator isused in production steps of various products such as ele ctronic devices, liquid crystals, or semiconductors,and contributes to improvem ent of the yield of a target product. The technique for emitting chargedparticl es is used not only in the static eliminator but also in various contexts such a s a semiconductorprocess or a thin film process.”
NETL
NSTL
