Abstract
The following quote was obtained by the news editors from the background informa tion supplied bythe inventors: ““Technical Field“The example and non-limiting embodiments relate generally to a robot and, more particularly, to atraversing robot with multiple end-effectors that can be util ized in material-handling vacuum-environmentsystems and other applications.“Brief Description of Prior Developments“Modern semiconductor manufacturing factories seek wafer processing systems with the following characteristics:a compact footprint (cost per unit area of facto ry floor space), capability of handling multiplewafers simultaneously (producti vity, for example, the number of wafers processed per unit time), andcapability of supporting flexible wafer flows (variety of recipes, maintenance of process modules duringoperation).”
NETL
NSTL