首页|Patent Issued for Systems and methods for integrating load locks into a factory interface footprint space (USPTO 12159796)

Patent Issued for Systems and methods for integrating load locks into a factory interface footprint space (USPTO 12159796)

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The assignee for this patent, patent number 12159796, is Applied Materials Inc. (Santa Clara, California,United States).Reporters obtained the following quote from the background information supplied by the inventors: “Anelectronic device manufacturing system can include one or more tools or components for transporting andmanufacturing substrates. Such too ls or components can include a factory interface connected to a loadlock and/or transfer chamber. In some instances, the load lock is positioned between the tr ansfer chamberand the factory interface. However, such a configuration can be i nefficient due to the manufacturing systemusing a large operational footprint. For example, this configuration can have a long width and/or lengthand large se ctions of unused space. Accordingly, improved electronic device manufacturing sy stems,apparatus, and methods for transporting and manufacturing substrates with increased footprint efficiencyare sought.”

Applied Materials Inc.BusinessEmergi ng TechnologiesMachine LearningRobotRoboticsTechnology Companies

2024

Robotics & Machine Learning Daily News

Robotics & Machine Learning Daily News

ISSN:
年,卷(期):2024.(Dec.19)