This review summarizes noise related works on piezoelectric microelectromechanical system (MEMS). First, fundamentals of piezoelectricity and noise sources are covered. Then, around 100 papers are tabulated based on the types of MEMS, authors, year of publication, piezoelectric materials, and nature of noise works i.e., theoretical, simulation, and measurement. Based on that table, we also discuss noise models, current trends, and future directions on this topic. This review is beneficial for researchers who develop next-generation piezoelectric MEMS. In the future, the influence of noise must be seriously taken into design considerations as the dimension of MEMS becomes smaller, but the complexities are higher.
NETL
NSTL
IEEE
