首页|Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode
Simultaneous tip force and displacement sensing for AFM cantilevers with on-chip actuation: Design and characterization for off-resonance tapping mode
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NSTL
Elsevier
The use of integrated on-chip actuation simplifies the identification of a cantilever resonance, can improve imaging speed, and enables the use of smaller cantilevers, which is required for low-force imaging at high speed. This article describes a cantilever with on-chip actuation and novel dual-sensing capabilities for AFM. The dualsensing configuration allows for tip displacement and tip force to be measured simultaneously. A mathematical model is developed and validated with finite element analysis. A physical prototype is presented, and its calibration and validation are presented. The cantilever is optimized for use in off-resonance tapping modes. Experimental results demonstrate an agreement between the on-chip sensors and external force and displacement measurements.
Active cantileverDual-sensingAtomic force microscopyTip forceMICROSCOPYSPECTROSCOPY
de Bem, Nata F. S.、Ruppert, Michael G.、Fleming, Andrew J.、Yong, Yuen K.
NSTL
Elsevier
