首页|Nanofluidic chip on tube as standard leak elements
Nanofluidic chip on tube as standard leak elements
扫码查看
点击上方二维码区域，可以放大扫码查看
原文链接
NSTL
Elsevier
The nanofluidic chips with channels of 100-nm depth and 3-mu m width were employed as molecular flow standard leak elements for vacuum technology applications in this paper. The nanofluidic chips are fabricated by MEMS technologies while the macro-micro connection is achieved using glass fusion bonding and standard Swagelok (R) Fitting. It is found that the choice of annealing temperature and holding time is a key issue regarding fusion bonding and the optimal processing parameters are 780 degrees C, 5 min. Meanwhile, the sealing reliability of fusion bonding and the fitting connection is evaluated. Experiment shows that the flow conductance of the as-fabricated leak can reach 10(-13) m(3).s(-1) magnitude for He, N-2 and Ar. This standard leak has the advantages of controlled dimensions, reliable connection, and constant flow conductance over a range of 10(5) Pa.
Standard leakNanofluidic chipMacro-micro connectionHermeticity testingConductance measurementMicro gas flowIN-SITU CALIBRATIONCONDUCTANCE ELEMENTIONIZATION GAUGES
NSTL
Elsevier
