Abstract
? 2022 Elsevier B.V.In this paper, we report on a micro-sensor employing two-dimensional (2D)- zero-dimensional (0D) heterostructure based on MOSe2/ZnO (fabricated by a novel Complementary Metal Oxide Semiconductor (CMOS) compatible microwave-irradiation-assisted solvothermal route) as a receptor. Density Functional Theory (DFT) calculations show that the heterostructure is more favorable to the adsorption of hydrogen sulfide (H2S) gas than the pristine 2D nanosheets. Experimentally, the device demonstrates sensitivity in the ultra-low concentration H2S range (i.e. 200 ppb – 6.1 ppm), and response of as high as 9.08% (200 ppb) - 186.91% (6.1 ppm) could be obtained repeatably with decent signal-to-noise ratio and response/recovery time (~600 sec). The device stands well on various sensor parameter tests including absolute response percentage, lower limit of detection (LOD), repeatability, reproducibility, hysteresis error, etc. A sensing mechanism based on Wolkentein's model is proposed to understand the detection behavior of the device.
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