首页|An optical waveguide microcantilever sensor with a dual-output waveguide readout

An optical waveguide microcantilever sensor with a dual-output waveguide readout

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An optical waveguide microcantilever sensor with a dual-output waveguide readout is developed to obtain a linear response for the deflection of cantilever. A finite element method is employed to characterize the optical waveguide microcantilever sensor. A systematic and detailed discussion has been presented to describe an optical waveguide cantilever sensor with a dual-output waveguide. One can see that most of the results are interesting, even very different from general opinions. The design is a tradeoff of the sensitivity, linearity and operation range. These will be helpful for an optimized design of the microcantilever sensor.

Optical waveguide microcantileverSensorIntegrated opticsCANTILEVERS

Zhang, Hongru、Fan, Guofang、Li, Shi、Jing, Gaoshan、Li, Yuan、Zhang, Zhiping

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Beijing Jiaotong Univ

Natl Inst Metrol

Chinese Acad Sci

Natl Ctr Measurement & Testing East China

Fudan Univ

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2022

Optics Communications

Optics Communications

EISCI
ISSN:0030-4018
年,卷(期):2022.514
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