Surface & Coatings Technology2022，Vol.4428.DOI:10.1016/j.surfcoat.2022.128336

Rayleigh and shear-horizontal surface acoustic waves simultaneously generated in inclined ZnO films for acoustofluidic lab-on-a-chip

Tao, Ran Luo, Jingting Zhou, Xiaosong Zhou, Jian McHale, Glen Reboud, Julien Torun, Hamdi Gibson, Desmond Tao, Kai Chang, Honglong Fu, Yong-Qing Pang, Hua-Feng
Surface & Coatings Technology2022，Vol.4428.DOI:10.1016/j.surfcoat.2022.128336
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  • NSTL
  • Elsevier

Rayleigh and shear-horizontal surface acoustic waves simultaneously generated in inclined ZnO films for acoustofluidic lab-on-a-chip

Tao, Ran 1Luo, Jingting 1Zhou, Xiaosong 2Zhou, Jian 3McHale, Glen 4Reboud, Julien 5Torun, Hamdi 1Gibson, Desmond 6Tao, Kai 7Chang, Honglong 7Fu, Yong-Qing 1Pang, Hua-Feng1
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作者信息

  • 1. Northumbria Univ
  • 2. China Acad Engn Phys
  • 3. Hunan Univ
  • 4. Univ Edinburgh
  • 5. Univ Glasgow
  • 6. Univ West Scotland
  • 7. Northwestern Polytech Univ
  • 折叠

Abstract

There are significant challenges in controlling uniformity of crystal inclination angles, growth orientations and film thicknesses to generate dual-mode surface acoustic waves (e.g., Rayleigh ones and shear-horizontal ones) for lab-on-a-chip applications. In this study, we demonstrate large area (up to three inches) and uniformly inclined piezoelectric ZnO films, sputtering-deposited on silicon using a glancing angle deposition method. Characterization using X-ray diffraction showed that the inclined ZnO films have an average crystal inclination angle of 29.0 degrees, apart from the vertical (0002) orientation, at a substrate tilting angle of 30 degrees. Reflection signals of ZnO/Si surface acoustic wave devices clearly show the generations of both shear horizontal surface acoustic waves and Rayleigh waves. The Rayleigh waves enable efficient acoustofluidic functions including streaming and transportation of sessile droplets. Excitation direction of Rayleigh waves on the acoustofluidics versus the inclined angle direction has apparent influences on the acoustofluidic performance due to the anisotropic microstructures of the inclined films. The same device has been used to demonstrate biosensing of biotin/streptavidin interactions in a liquid environment using the shear-horizontal surface acoustic waves, to demonstrate its potential for integration into a complete lab-on-a-chip device.

Key words

ZnO film/c-Axis inclined orientation/Shear horizontal-SAW/Acoustofluidics/C-AXIS/ULTRASONIC TRANSDUCERS/THIN-FILMS/MICROFLUIDICS/PROPAGATION/BIOSENSORS/DEVICES

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出版年

2022
Surface & Coatings Technology

Surface & Coatings Technology

ISTP
ISSN：0257-8972
被引量2
参考文献量49
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