首页|Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager
Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager
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NSTL
Elsevier
In this study, we fabricated a row-column addressed 2-dimensional piezoelectric micromachined ultrasonic transducer (pMUT) array based on the monocrystalline Pb(Zr, Ti)O3 (Mono PZT)-based thin film, and demonstrated its application as the ultrasound imager. At first, we optimized the island-shaped design as an individual element, and then developed the fabrication process based on the control of the edge shape of an insulative polymer pattern. As a result, the hexagonally arranged arrays with 372 elements at the maximum were fabricated successfully, of which the diameter and pitch were 70 mu m and 120 mu m, respectively. The resonance frequency, displacement sensitivity, and quality factor in air measured approximately 5.4 MHz, 175 nm/V and 175, respectively. This array exhibited low crosstalk. The actuation of the unaddressed element was less than 10 % of that of the addressed one. In addition, the deviations on the resonance frequencies and displacement sensitivities were as small as only 2 % and 15 %, respectively. Then, the basic acoustic performance in a medium FC-70 was evaluated by using the minimum unit array composed of 5 columns. Also, the transmitting beamforming of a focused ultrasonic burst wave was done by applying driving voltages with a time delay. Finally, an ultrasonic imaging for a metallic object was demonstrated by mechanically scanning the object.
NSTL
Elsevier
