首页|Self-correction of air refractive index in distance measurement using two-color sinusoidal phase modulating interferometry
Self-correction of air refractive index in distance measurement using two-color sinusoidal phase modulating interferometry
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NSTL
Elsevier
? 2021 Elsevier B.V.A two-color sinusoidal phase modulating (SPM) interferometer based on electro-optic modulator (EOM) is devised for self-correction of air refractive index in distance measurement. Two laser sources with high frequency stability and close wavelengths (633 nm and 782 nm) are used in this scheme. High-accuracy phase demodulation was realized using phase generated carrier (PGC) demodulation techniques with an FPGA-based signal processing board. Experimental results of nanometer displacement measurements show that the resolution and accuracy of PGC demodulation is better than 1°, and the nonlinear error is less than 0.2°. Performance tests of two-color SPM interferometer compared with one-color interferometers under dynamic environment were implemented with an arm length difference of 4 m. The results show that, the measured distance of one-color interferometer drifts 4.8 μm in 600 s, which is caused by the deviation between the measured value of air refractive index and the actual value along the laser propagation path, and this drift reduces to ±1.5 μm using two-color interferometer without environmental sensing.
Air refractive index correctionDistance measurementSinusoidal phase modulating interferometryTwo-color method
Lou Y.、Zhou Y.、Chen B.、Yan L.、Zhang S.
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Nanometer Measurement Laboratory Zhejiang Sci-Tech University
NSTL
Elsevier
