首页|(163003)Reproducible and arbitrary patterning of transparent ZnO nanorod arrays for optic and biomedical device integration

(163003)Reproducible and arbitrary patterning of transparent ZnO nanorod arrays for optic and biomedical device integration

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Here, we report a robust method for fabricating ZnO nanorod arrays with arbitrary patterns on glass substrate for device integration applications. Photolithography patterned non-transparent Zn film is used as growth sites for ZnO nanorods in the hydrothermal reactions for facile and reproducible fabrication. Patterns including lines, dots, texts, and logos have been demonstrated and the dimension of ZnO nanorods are tunable. The semi-transparent ZnO nanorod/glass shows increased light transmission when immersed in water, which is an advantage when integrate into devices requiring optical imaging and sensing. For proof-of-concept purpose, surface-enhanced Raman scattering sensors based on Ag coated ZnO nanorods with back observation configuration are demonstrated and show high sensitivity.

NanorodZnOSERSMicrofabricationPhotolithography

Yuting Xiong、Minghe Fang、Qingfeng Zhang

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Key Laboratory of Advanced Civil Engineering Materials of Ministry of Education, Shanghai Key Laboratory of DM for Metal-Functional Materials, School of Materials Science & Engineering, and Institute for Advanced Study, Tongji University, Shanghai 201804

Hubei Key Lab ofFerro & Piezoelectric Materials and Devices, School of Materials Science & Engineering, Hubei University, Wuhan 430062, China

2022

Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
年,卷(期):2022.898
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