首页|(162830)Crystal growth and design of Sn-doped β-Ga_2O_3: Morphology, defect and property studies of cylindrical crystal by EFG

(162830)Crystal growth and design of Sn-doped β-Ga_2O_3: Morphology, defect and property studies of cylindrical crystal by EFG

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The cylindrical Sn: β-Ga_2O_3 crystal with high crystalline quality was successfully designed and grown by the innovative edge-defined film-fed growth (EFG) method equipped with a cylindrical Iridium die. The challenges for the growth of Sn: β-Ga_2O_3 crystals were overcome by optimizing the design of an afterheater. The growth morphology of cylindrical β-Ga_2O_3 crystal was studied using a theoretical model and the results from experimental crystal growth. The order of importance of growth conditions affecting β-Ga_2O_3 crystal growth morphology was examined, based on the morphological features of cylindrical β-Ga_2O_3 crystals obtained by the EFG and Czochralski methods. The iridium inclusions with three shapes were observed in bulk β-Ga_2O_3 crystal, and the formation mechanism was carefully discussed. The optical bandgap and valence band maximum (VBM) of Sn: β-Ga_2O_3 crystal were calculated to be 4.74 eV and 3.49 eV by absorption spectra and X-ray photoelectron spectroscopy (XPS), respectively. The corresponding surface barrier height (φ_(surf)) was 1.25 eV. The carrier concentration of 5.95× 10~(18) cm~(-3) was characterized by capacitance-voltage (C-V) measurement. By the Hall measurement, the carrier mobility and resistivity were estimated to be around 51 cm~2 V~(-2) s~(-1) and 3.55 ×10~(-2) Ω cm, respectively.

Sn-doped β-Ga_2O_3Cylindrical crystalEFGMorphologyDefect

Bo Fu、GuangzhongJian、Wenxiang Mu

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State Key Laboratory of Crystal Materials, Shandong University, Jinan, Shandong 250100, China

School of Microelectronics, University of Science and Technology of China, Hefei 230026, China

2022

Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
年,卷(期):2022.896
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