Journal of Alloys and Compounds2022,Vol.8969.DOI:10.1016/j.jallcom.2021.162830

(162830)Crystal growth and design of Sn-doped β-Ga_2O_3: Morphology, defect and property studies of cylindrical crystal by EFG

Bo Fu GuangzhongJian Wenxiang Mu
Journal of Alloys and Compounds2022,Vol.8969.DOI:10.1016/j.jallcom.2021.162830

(162830)Crystal growth and design of Sn-doped β-Ga_2O_3: Morphology, defect and property studies of cylindrical crystal by EFG

Bo Fu 1GuangzhongJian 2Wenxiang Mu1
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作者信息

  • 1. State Key Laboratory of Crystal Materials, Shandong University, Jinan, Shandong 250100, China
  • 2. School of Microelectronics, University of Science and Technology of China, Hefei 230026, China
  • 折叠

Abstract

The cylindrical Sn: β-Ga_2O_3 crystal with high crystalline quality was successfully designed and grown by the innovative edge-defined film-fed growth (EFG) method equipped with a cylindrical Iridium die. The challenges for the growth of Sn: β-Ga_2O_3 crystals were overcome by optimizing the design of an afterheater. The growth morphology of cylindrical β-Ga_2O_3 crystal was studied using a theoretical model and the results from experimental crystal growth. The order of importance of growth conditions affecting β-Ga_2O_3 crystal growth morphology was examined, based on the morphological features of cylindrical β-Ga_2O_3 crystals obtained by the EFG and Czochralski methods. The iridium inclusions with three shapes were observed in bulk β-Ga_2O_3 crystal, and the formation mechanism was carefully discussed. The optical bandgap and valence band maximum (VBM) of Sn: β-Ga_2O_3 crystal were calculated to be 4.74 eV and 3.49 eV by absorption spectra and X-ray photoelectron spectroscopy (XPS), respectively. The corresponding surface barrier height (φ_(surf)) was 1.25 eV. The carrier concentration of 5.95× 10~(18) cm~(-3) was characterized by capacitance-voltage (C-V) measurement. By the Hall measurement, the carrier mobility and resistivity were estimated to be around 51 cm~2 V~(-2) s~(-1) and 3.55 ×10~(-2) Ω cm, respectively.

Key words

Sn-doped β-Ga_2O_3/Cylindrical crystal/EFG/Morphology/Defect

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出版年

2022
Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
被引量11
参考文献量60
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