Surface erosion in nc-ZrN/a-ZrCu multilayer films after He irradiation
Uglov, V. V. 1Abadias, G. 2Zlotski, S. V. 1Saladukhin, I. A. 1Veremei, I. S.1
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作者信息
1. Belarusian State Univ
2. Univ Poitiers
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Abstract
The work is dedicated to the study of the phase stability and surface erosion of a novel Zr-based multilayer system consisting of a combination of ceramic (ZrN) and metallic glass (Zr-Cu) nanoscale layers after He irradiation (40 keV and doses up to 1.1 x 1018 cm(-2)). Periodic ZrN/Zr(1-x)Cux multilayers with elementary layer thicknesses of 5 nm/5 nm and 5 nm/10 nm and Cu content x = 0.45, 0.53, 0.61 and 0.74 were grown by magnetron sputter-deposition from Zr and Cu targets at the substrate temperature of 300 C. X-ray diffraction and X-ray reflectivity analysis reveal that multilayered films consist of alternating nanocrystalline (nc) ZrN and amorphous (a) ZrCu layers with relatively sharp interfaces. The stability of the phase composition of nc-ZrN/a-Zr1-xCux multilayer films to irradiation with helium ions up to fluence of 1.1 x 1018 cm- 2 has been established. For x = 0.74, crystallization of the metallic glass layer was observed. The surface integrity of the multilayer films remained unaltered up to an ion fluence of 5 x 1017 cm(-2). At higher ion fluence, surface erosion of the nc-ZrN/a-Zr(1-x)Cu(x )films occurs by the flacking mechanism. In this case, an increase in the thickness of the amorphous Zr(1-x)Cux layer and in Cu content leads to improved radiation resistance as the critical fluence for delamination increases from 5 x 1017 cm(-2) upto 8 x 1017 cm(-2).
NSTL
Elsevier