Surface & Coatings Technology2022,Vol.4298.DOI:10.1016/j.surfcoat.2021.127981

Role of atomic layer deposited TiOxNy interlayer in tribological and corrosion properties of CrN coating

Kong, Ji-Zhou Zhai, Qing-Wei Shen, Jun-Jie Sun, Xin-Yu Cao, Yan-Qiang Xuan, Yan Li, Ai-Dong Wang, Qian-Zhi Zhou, Fei
Surface & Coatings Technology2022,Vol.4298.DOI:10.1016/j.surfcoat.2021.127981

Role of atomic layer deposited TiOxNy interlayer in tribological and corrosion properties of CrN coating

Kong, Ji-Zhou 1Zhai, Qing-Wei 1Shen, Jun-Jie 1Sun, Xin-Yu 1Cao, Yan-Qiang 2Xuan, Yan 3Li, Ai-Dong 4Wang, Qian-Zhi 1Zhou, Fei1
扫码查看

作者信息

  • 1. Nanjing Univ Aeronaut & Astronaut
  • 2. Nanjing Univ Sci & Technol
  • 3. Nanjing Forestry Univ
  • 4. Nanjing Univ
  • 折叠

Abstract

The growth defects in the sputtered CrN coatings can worsen their tribological and corrosion properties. To improve the above deficiency, the atomic layer deposited TiN was deposited on the sputtered CrN layer, oxidized and then again coated by CrN to form the sandwich-structured CrN/TiOxNy/CrN composite coating. The insertion of the TiOxNy interlayer resulted in (111) preferred orientation and the grain refinement of CrN crystals, leading to the improvement in its mechanical performance and corrosion resistance. As the thickness of the TiOxNy layer increased, the mechanical and corrosion properties of the composite coatings were further improved. The composite coating inserted with a 30 nm-thick TiOxNy interlayer delivered the greatest corrosion resistance, the lowest friction coefficient and wear rate as well as high hardness and adhesion strength, which could be attributed to the synergistic effect of the multilayered TiOxNy interlayer.

Key words

CrN hard coating/Oxidation/TiOxNy interlayer/Wear/Corrosion/MECHANICAL-PROPERTIES/PROTECTION/AL2O3/FILMS/BEHAVIOR/STEEL/TIALN/TIO2/TIN

引用本文复制引用

出版年

2022
Surface & Coatings Technology

Surface & Coatings Technology

ISTP
ISSN:0257-8972
被引量2
参考文献量32
段落导航相关论文