首页|Chemical vapor deposition of CoFe2O4 micropillar arrays with enhanced magnetic properties
Chemical vapor deposition of CoFe2O4 micropillar arrays with enhanced magnetic properties
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NSTL
Elsevier
Single-step thermal chemical vapor deposition was optimized at 400 °C for the growth of CoFe2O4 spinel thin films starting from the corresponding metal acetylacetonate precursors. Enhanced magnetization was observed for conditions leading to a columnar growth with a preferred (100) orientation. The implemented liquid precursor delivery secured a reliable films’ composition control and a straightforward dosage of acetylacetone, as a molecular growth inhibitor, to enhance the film conformality on structured surfaces. The optimized conditions enabled an efficient micro-pore filling, and the fabricated ordered micropillar arrays feature a coercivity of 1.8 kOe and a saturation magnetization of 350 emu/cm3. The implemented state-of-the-art up-scalable microfabrication technology, the reasonable thermal budget and the resulting high magnetic performance pave the way towards the development of innovative magnetoelectric devices.
CFOCVDFerromagneticMicropillarThin films
Aspe B.、Vakilinejad A.、Menguelti K.、Bahlawane N.、Malyeyev A.、Michels A.
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Material Research and Technology Department Luxembourg Institute of Science and Technology
Department of Physics and Materials Science University of Luxembourg
NSTL
Elsevier
