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Miniature capacitance diaphragm gauge for absolute vacuum measurement
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NSTL
Elsevier
Miniaturization of sensors using micromachining technology is full of potential and challenges. A miniature capacitance diaphragm gauge for absolute vacuum measurement is developed in this work. Both theoretical calculation and simulation method are used to analyze the working principle of the pressure sensitive diaphragm in different pressure regions. During the manufacturing processes, a silicon block coated with non-evaporable getter films is used to protect the diaphragm and maintain the vacuum pressure of the reference cavity. The capacitance diaphragm gauge with an overall size of 8 x 10 x 1.4 mm(3) was successfully fabricated, and its vacuum metrologies in rough and medium vacuum regime were evaluated systematically. The lower measure-ment limit of the gauge is 0.1 Pa, its maximum and minimum sensitivities in the range of 0.1 Pa to 84 kPa are 10.96 and 0.16 fF/Pa, respectively. The repeatability and the hysteresis errors of the gauge are less than 1.3% and 5.3%.
NSTL
Elsevier
