首页|Fast determination of sample thickness through scanning moire fringes in scanning transmission electron microscopy

Fast determination of sample thickness through scanning moire fringes in scanning transmission electron microscopy

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  • NSTL
  • Elsevier
Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for sample thickness determination in scanning TEM (STEM) mode based on scanning moire fringes (SMFs). Focal-series SMF imaging is used and sample thickness can be determined in situ at a medium magnification range, with beam damage and contamination avoided to a large extent. It provides a fast and convenient approach for determining sample thickness in TEM imaging, which is particularly useful for beamsensitive materials.

Thickness determinationScanning moire fringesBeam-sensitive materialsScanning transmission electron microscopyFERROELECTRICITY

Nan, Pengfei、Liang, Zhiyao、Zhang, Yue、Liu, Yangrui、Song, Dongsheng、Ge, Binghui

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Anhui Univ

2022

10.1016/j.micron.2022.103230

Micron

Micron

EISCI
ISSN：0968-4328
年,卷(期)：2022.155
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