首页|Application of the plasma surface sintering conditions in the synthesis of ReBx-Ti targets employed for hard films deposition in magnetron sputtering technique

Application of the plasma surface sintering conditions in the synthesis of ReBx-Ti targets employed for hard films deposition in magnetron sputtering technique

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  • NSTL
  • Elsevier
Preparation of a ternary ReBx-Ti compound within a single magnetron target, forming a plasma surface sintering (PSS) conditions, were investigated. An ionized-neon pressure of 40 Pa induced sintering power pulses (E-i) with energies of up to 3.1 kJ, which resulted in a low-porosity rhenium boride (3.2%) structure within a solid titanium matrix (ReBx-Ti). The prepared targets showed promising resistance to high temperatures (5.45 mm(2)/s of thermal diffusivity), after the PSS process at a temperature above 2100 degrees C. These as-surface-sintered magnetron targets were further used in gas injection magnetron sputtering to obtain Re-B-Ti films characterized by an enhanced deposition rate (120 nm/min). Quantitative analysis of these films revealed that the B/Re ratio was in deficit in comparison to the stoichiometry of as-prepared cathode materials. A multiple-chemical-bond state showed the occurrence of Re-B, Ti-B, B-B, Ti-Ti, Ti-O, and B-O phases, of which TiB2 and ReB2 were dominant, forming therefore a glass-like structure. All gathered data indicated a maximum Vickers microhardness value (36.4 GPa), emphasizing the valuable mechanical response of the deposited Re-B-Ti films, as well as the retaining of their good self-passivation effect, attributed by the oxide phases.

Plasma surface sinteringPowder targetGas injection magnetron sputteringRhenium diboride phaseTitanium diboride phaseMechanical propertiesSUPERHARD RHENIUM DIBORIDETHIN-FILMSMECHANICAL-PROPERTIESMECHANOCHEMICAL SYNTHESISHIGH-PRESSURECERAMICSTITANIUMMICROSTRUCTURESIMULATIONSTABILITY

Wicher, Bartosz、Chodun, Rafal、Trzcinski, Marek、Lachowski, Artur、Nowakowska-Langier, Katarzyna、Ibrahim, Samih Haj、Jaroszewicz, Jakub、Kubis, Michal、Grzanka, Ewa、Zdunek, Krzysztof

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Warsaw Univ Technol

Bydgoszcz Univ Sci & Technol

Polish Acad Sci

Natl Ctr Nucl Res NCBJ

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2022

10.1016/j.ijrmhm.2021.105756

International Journal of Refractory Metals & Hard Materials

International Journal of Refractory Metals & Hard Materials

SCI
ISSN：0263-4368
年,卷(期)：2022.103
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