Journal of Alloys and Compounds2022,Vol.8969.DOI:10.1016/j.jallcom.2021.162924

(162924)High power impulse magnetron sputtering growth processes for copper nitride thin film and its highly enhanced UV - visible photodetection properties

Shikha Sakalley Adhimoorthy Saravanan Wei-Chun Cheng
Journal of Alloys and Compounds2022,Vol.8969.DOI:10.1016/j.jallcom.2021.162924

(162924)High power impulse magnetron sputtering growth processes for copper nitride thin film and its highly enhanced UV - visible photodetection properties

Shikha Sakalley 1Adhimoorthy Saravanan 2Wei-Chun Cheng1
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作者信息

  • 1. Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan
  • 2. Graduate Institute of Electro-Optical Engineering and Department of Electronic and Computer Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan
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Abstract

Copper Nitride (Cu_3N) thin films exhibit promising optoelectronic properties and are favourable for further applications in the field of photodetection, lithium-ion batteries etc. In this work, Cu_3N thin film deposited by reactive High-Power Impulse Magnetron Sputtering (HiPIMS) and used for photodetection application for the first time. The microstructure of Cu_3N nanocrystal shows the uniform crystalline morphology and less defects due to high target species ionization rate. The phase structure analysis results confirmed the presence of nitrogen within Cu_3N thin film that is composed of Cu_3N crystallites with anti-ReO_3 structure. Remarkably, optical properties reveal significant absorbance and enhancement in ultraviolet (UV) and visible (Viz) range, which strongly affect the photodetection properties of fabricated ITO/Cu_3N/ITO device. Excellent photosensitivity of 3792% was attained with a fixed light intensity. Furthermore, the photosensitivity was increased to 7443% with increased light intensity. It was perceived that the enhanced surface properties and perfect formation of ITO/Cu_3N/ITO resulted in beneficial pn junction thus exhibits high performance and ultrafast electron-hole recombination. Also, the HiPIMS technique offers high-quality films with a dense and smooth surface that helped in enhancing photodetection. These outstanding results emanate Cu_3N films could be potential candidate for future optoelectronic devices fabrication that can be applied in smart thin-film gadgets.

Key words

High Power Impulse Magnetron Sputtering/(HiPlMS)/Copper nitride films/UV-Viz Photodetection of ITO- Cu_3N/Cu_3N nanocrystals Photodetection

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出版年

2022
Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
被引量5
参考文献量57
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