首页|Visible-light catalyzed assisted chemical mechanical polishing of single crystal diamond
Visible-light catalyzed assisted chemical mechanical polishing of single crystal diamond
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NSTL
Elsevier
? 2022 Elsevier B.V.The high hardness, wear resistance and chemical inertness of single crystal diamond makes it challenging to achieve high efficiency and high quality chemical mechanical polishing (CMP) of single crystal diamond with material removal rate MRR higher than 300 nm/h and surface roughness Ra lower than 0.5 nm. The hydroxyl radicals (·OH) produced by the Fenton reaction are strongly oxidizing and can be used for CMP. In this study, ND/LDH catalysts synthesized from nanodiamond (ND) and CuFe-layered double hydroxide (LDH) for visible-light-Fenton reaction were prepared. The dynamics of the ·OH concentration produced by 4 groups of reaction solutions, including hydrogen peroxide and hydrogen peroxide mixed with ferrous sulfate and hydrogen peroxide mixed with ND/LDH and hydrogen peroxide mixed with ND/LDH (visible-light irradiation), were measured. Then, the single crystal diamond was polished with 4 groups of reaction solutions with diamond powder added. The results showed that: hydrogen peroxide mixed with ND/LDH (visible-light irradiation) reaction solution produced the highest ·OH concentration, and achieved high efficiency and high quality polishing of single crystal diamond, with the material removal rate MRR of 370 nm/h and surface roughness Ra of 0.110 nm.
Chemical mechanical polishingFenton reactionSingle crystal diamondVisible-light
Yang H.、Jin Z.、Niu L.、Wang H.、Niu H.
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Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology
NSTL
Elsevier
