首页|Variation of sputtered WO2.72 film thickness in Ag (NPs)/WO2.72/Au (NPs) system for optimizing sensing behaviors to NH3

Variation of sputtered WO2.72 film thickness in Ag (NPs)/WO2.72/Au (NPs) system for optimizing sensing behaviors to NH3

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In this work, double activation of the optimal thickness of Ag NPs/WO(2.72)2/Au NPs thin films have been fabricated by DC sputtering followed by thermal annealing treatment for ammonia gas sensing applications. The effect of WO2.72 thickness on the response level and optimum working temperature of Ag NPs/WO2.72/Au NPs sensors is explored and compared with that of Ag NPs/WO2.72, and WO2.72 films. The results obtained in this work demonstrate that the response to 100 ppm ammonia of Ag NPs/WO2.72/Au NPs was 84%, which was twice and seven times higher that of Ag NPs/WO2.72 and pure WO2.72, respectively.

Thin filmsGas sensorTungsten oxideSurface modificationsSELECTIVE DETECTIONAU NANOPARTICLESGASSENSORNANOCOMPOSITEDIAGNOSIS

Drmosh, Q. A.

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King Fahd Univ Petr & Minerals KFUPM

2022

Chemical Physics Letters

Chemical Physics Letters

EISCI
ISSN:0009-2614
年,卷(期):2022.790
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