首页|Sb incorporated SnO2 nanostructured thin films for CO2 gas sensing and humidity sensing applications

Sb incorporated SnO2 nanostructured thin films for CO2 gas sensing and humidity sensing applications

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? 2022 Elsevier B.V.Antimony-doped SnO2 (SnO2:Sb) thin films were deposited on glass substrates via sol-gel spin coating and tested for CO2 gas and humidity sensors. The dominant peak (110) of XRD pattern of SnO2:Sb thin films confirmed the cassiterite tetragonal structure regardless of Sb dopant concentration. The spherical particles like morphology were found for all sample and confirmed by scanning electron microscopy (SEM). The transmittance spectra were recorded in the wavelength range 300–800 nm and the optical bandgap was varied from 3.65 to 4.03 eV on increasing Sb concertation in SnO2. From I-V characteristics, sample C3 has the minimum resistivity (1.08 × 108 Ω.cm) and maximum conductivity 9.23 × 10?9 (Ω.cm)?1 at bias voltage 5 V. The gas sensing characteristics of Sb-SnO2 thin films were examined at different operating temperatures (30 °C to 80 °C) for sample C0 to C4. The optimized sample C0 have gas sensor response 78.5% at ambient temperature (30 °C). The higher doping of Sb in SnO2 as sample C3 and C4 were suitable for higher operating temperatures (80 °C) and responses were 18.74% and 71%, respectively. The characteristics of humidity sensors were analysed in relative humidity (%RH) range from 10% to 90%RH for Sb-SnO2 thin films and found suitable for sample C0 at ambient temperature in mid humidity range (35–60%RH). The present study is an attempt to design a cost-effective and low-temperature-based resistive CO2 gas sensor and humidity sensor for the enhancement in sensing properties.

CO2 gas sensorHumidity sensorSnO2:Sb thin filmsSol-gel methodXRD

Panday M.、Upadhyay G.K.、Purohit L.P.

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Semiconductor Research Lab Department of Physics Gurukula Kangri (Deemed to be University)

2022

Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
年,卷(期):2022.904
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