Journal of Alloys and Compounds2022,Vol.90010.DOI:10.1016/j.jallcom.2021.163506

Structural and corrosion resistance properties of sputtered zirconium nitride thin films as electrode material for supercapacitor

Pan B. Liu C. Zhang S. Wang J. Wu R. Liu L.
Journal of Alloys and Compounds2022,Vol.90010.DOI:10.1016/j.jallcom.2021.163506

Structural and corrosion resistance properties of sputtered zirconium nitride thin films as electrode material for supercapacitor

Pan B. 1Liu C. 1Zhang S. 1Wang J. 1Wu R. 1Liu L.1
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作者信息

  • 1. College of Materials and Chemistry & Chemical Engineering Chengdu University of Technology
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Abstract

In this paper, the surface morphology, crystal structure and corrosion resistance of the magnetron sputtered zirconium nitride (ZrN) thin films were evaluated and investigated. The results show that the surface of the prepared films is homogeneous and dense, and the root-mean-square surface roughness (Rq) are 21.0 nm (ZrN0.45), 1.8 nm (ZrN0.4), and 2.0 nm (ZrN0.35), respectively. With the increase of nitrogen partial pressure, the content of Zr3N4 in the ZrN films increased gradually. Potentiodynamic polarization and electrochemical impedance spectroscopy (EIS) measurements demonstrate that all samples enhance the corrosion performance of ZrN-coated 304 SS. ZrN0.4 possesses a best corrosion resistance in 0.5 M Na2SO4 solution, which maintains complete and dense surface morphologies after 50 h immersion. The underlying related corrosion mechanism was explored and discussed, and the excellent corrosion resistance of ZrN0.4 film on 304 SS can be ascribed to a lower density of pin-hole defects and the dense passive layer of ZrO2.

Key words

Corrosion resistance/Magnetron sputtering/Na2SO4 aqueous solution/Thin film/Zirconium nitride

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出版年

2022
Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
被引量8
参考文献量65
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