首页|Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe
Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe
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NSTL
Elsevier
On-machine measurement based on chromatic confocal principle is an effective method for quality control in precision manufacturing. However, angular misalignment between the measurement axis and the optical axis of probe will introduce cosine error, and the probe offset will cause rotational deviation. These alignment errors, which negatively affect measurement accuracy, are represented by beam vector deviations. In this paper, the influence of the beam vector deviation is first quantitatively analyzed. Then, an effective calibration method using standrad parts is proposed. The accuracy of the calibration method is verified by measuring standard sphere profile, and the uncertainty considering indication error, random error, sampling strategy and fitting optimization algorithm is evaluated. The feasibility of the proposed method is demonstrated by practical on-machine measurement experiments of a typical high-gradient freeform surface. Trajectory deviation is cor-rected based on virtual rotation center planning. The results agree well with offline measurements.
Multi -axis on-machine measurementChromatic confocal probePosition and orientation calibrationVirtual rotation centerDiamond turning machine
NSTL
Elsevier
