Surface & Coatings Technology2022，Vol.43612.DOI:10.1016/j.surfcoat.2022.128293

Thin film nanostructuring at oblique angles by substrate patterning

Munoz-Pina, S. Alcaide, A. M. Limones-Ahijon, B. Oliva-Ramirez, M. Rico, V. Alcala, G. Gonzalez, M. U. Garcia-Martin, J. M. Alvarez, R. Wang, D. Schaaf, P. Gonzalez-Elipe, A. R. Palmero, A.
Surface & Coatings Technology2022，Vol.43612.DOI:10.1016/j.surfcoat.2022.128293
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  • NSTL
  • Elsevier

Thin film nanostructuring at oblique angles by substrate patterning

Munoz-Pina, S. 1Alcaide, A. M. 2Limones-Ahijon, B. 3Oliva-Ramirez, M. 2Rico, V. 2Alcala, G. 4Gonzalez, M. U. 3Garcia-Martin, J. M. 3Alvarez, R. 2Wang, D. 5Schaaf, P. 5Gonzalez-Elipe, A. R. 2Palmero, A.2
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作者信息

  • 1. Nano4Energy SLNE
  • 2. Inst Ciencia Mat Sevilla CSIC US
  • 3. CSIC CEI UAM CSIC
  • 4. Univ Complutense Madrid
  • 5. TU Ilmenau
  • 折叠

Abstract

It is demonstrated that, besides classical nanocolumnar arrays, the oblique angle geometry induces the growth of singular structures in the nanoscale when using wisely designed patterned substrates. Well-ordered array of crosses, cylindrical nanorods or hole structures arranged in square or hexagonal regular geometries are reported as examples, among others. The fundamental framework connecting substrate topography and film growth at oblique angles is presented, allowing the use of substrate patterning as a feasible thin film nanostructuring technique. A systematic analysis of the growth of TiO2 thin films on 4 different lithographic patterned substrates in 4 different scale lengths is also presented. A first conclusion is the existence of a height-based selective growth in the initial stages of the deposition, by which the film preferentially develops on top of the tallest substrate features. This behavior is maintained until the film reaches a critical thickness, the so-called Oblivion Thickness, above which the film topography becomes gradually independent of the substrate features. A general formula relating the spatial features of the pattern, the coarsening exponent and the Oblivion Thickness has been deduced.

Key words

Magnetron sputtering/Nanostructured thin films/Substrate patterning/Oblique angle deposition/Porous thin films/DEPOSITION/GROWTH/MEMBRANES/ARRAYS

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出版年

2022
Surface & Coatings Technology

Surface & Coatings Technology

ISTP
ISSN：0257-8972
被引量1
参考文献量46
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