Abstract
? 2022 Elsevier B.V.The work describes the role of Nb addition on the magneto-structural properties of magnetron sputtered Si/SiO2/W/(CoFeB)1?xNbx (x = 0, 3, 5 and 10) metal metalloid alloy thin films. Films were grown at substrate temperature (Ts) of RT, 300 °C and 500 °C to realise the influence of Nb content in the amorphous and nano-crystalline states of (CoFeB)1?xNbx thin films. RT deposited films are soft magnetic (coercivity (Hc) ≤ 10 Oe), exhibits amorphous microstructure and display a well-defined uniaxial magnetic anisotropy (UMA) in the film plane. At 300 °C, devitrification occurs, and the film (x = 0) becomes partially crystalline with precipitation of FeCo nano-crystals, and UMA nearly disappears. With increasing Nb content, the mean grain size and amount of FeCo nano-crystals decreases, and partially crystalline CoFeB films transform to a completely amorphous microstructure with the simultaneous appearance of in-plane UMA and systematic improvement in soft-magnetic nature (Hc decreases from~22–5 Oe). Nb addition on at Ts= 500 °C results in grain growth inhibition and magnetically isotropic (CoFeB)1?xNbx films (except x = 3). The present study demonstrates that thermally stable amorphous CoFeB films with desired soft magnetic properties can be prepared by appropriate selection of Nb content and suitable growth temperature.
NSTL
Elsevier