Journal of Alloys and Compounds2022,Vol.8988.DOI:10.1016/j.jallcom.2021.162843

(162843)Precise composition control and cation nonstoichiometry in La-doped BaSnO_3 thin films grown by MOCVD

Tomas Murauskas Virgaudas Kubilius Martynas Talaikis
Journal of Alloys and Compounds2022,Vol.8988.DOI:10.1016/j.jallcom.2021.162843

(162843)Precise composition control and cation nonstoichiometry in La-doped BaSnO_3 thin films grown by MOCVD

Tomas Murauskas 1Virgaudas Kubilius 1Martynas Talaikis2
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作者信息

  • 1. Institute of Chemistry, Faculty of Chemistry and Geosciences, Vilnius University, LT- 03225 Vilnius, Lithuania
  • 2. Department of Bioelectrochemistry and Biospectroscopy, Institute of Biochemistry, Life Sciences Center, Vilnius University, Sauletekis Ave. 7, LT-10257 Vilnius, Lithuania
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Abstract

La:BaSnO_3 has recently emerged as an outstanding perovskite oxide material due to its high electron mobility. To-date, lower electron mobility in thin films compared to the single-crystal are discussed in terms of the presence of dislocations, nearly neglecting the role of cation nonstoichiometry. However, by controlling Sn/Ba compositional ratio, we demonstrate the significance of stoichiometry and resulting point defects on microstructure, morphology, electrical properties, and Raman defect modes in epitaxial La:BaSnO_3 films. A narrow compositional window is demonstrated to yield high mobility and smooth morphology in La:BaSnO_3 thin films using the metalorganic chemical vapor deposition. The room temperature electron mobility of 121 cm~2V~(-1)s~(-1) and 85 cm~2V~(-1)s~(-1) was achieved on SrTiO_3 and MgO substrates, respectively. Correlation between the lowering of the A_1 g soft mode near 140 cm~(1) frequency and increase in the carrier mobility is demonstrated by Raman spectroscopy analysis. It was suggested that the position of this soft mode might be employed as a marker band for probing the electrical properties of La-doped BaSnO_3 perovskites.

Key words

Chemical vapor deposition/Nonstoichiometry/Perovskite oxide thin film/La:BaSnO_3/Raman spectroscopy/Surface morphology

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出版年

2022
Journal of Alloys and Compounds

Journal of Alloys and Compounds

EISCI
ISSN:0925-8388
被引量2
参考文献量45
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