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Three-dimensional micro-displacement measurement method based on capacitance-grating sensor
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NSTL
Elsevier
In order to solve the problems that it's difficult in installing a sensor in a narrow space and identifying microdisplacement direction in micro-displacement measurement. A three-dimensional micro-displacement measurement method based on capacitance-grating sensor was proposed by highlighting the idea of combining several groups of capacitance grids and the theory of displacement coordinate decomposition. The sensor structure was optimized and a three-dimensional micro-displacement test system was also established. By taking into consideration the positional relationship of the sensors in measurement model, a micro-displacement measurement model of sphere eccentricity was established to deduce the relationship between the displacement in the x,y and z directions and capacitance change. The relationship between the displacement direction and the capacitance change trend was also analyzed, based on which, a three-dimensional spatial microdisplacement decoupling mathematical model was established to measure displacement and judge the specific direction. BP neural network was also used to realize the decoupling of three-dimensional spatial microdisplacement and verification of decoupling accuracy. Under the ideal simulation conditions, the decoupling errors in x,y and z directions are less than 4 mu m. The experimental results show that decoupling errors are all less than 8 mu m. According to the results, the three-dimensional micro-displacement measurement method based on capacitance-grating sensor could measure the three-dimensional micro-displacement and identify the direction. The accuracy could reach 1.6% over the full range of sensor.
NSTL
Elsevier
