Capacitive sensorsCapacitance measurementImpedance spectroscopySwitched capacitor circuitsCapacitance-to-voltageResonanceCapacitance-to-relaxation timeCapacitance-to-phaseAuto-balancing bridgeSigma-delta methodDual-slope methodFRONT-END CIRCUITTO-DIGITAL CONVERTERINTERFACE CIRCUITMEASUREMENT SYSTEMDIFFERENTIAL-CAPACITANCERELAXATION-OSCILLATORLOW-COSTSENSORSDESIGN