首页|In-process detection of hot-embossed two-level microstructures by the green light sensing
In-process detection of hot-embossed two-level microstructures by the green light sensing
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NSTL
Elsevier
? 2022 Elsevier LtdThe microlens distributed on microprism surface is applied in high value-added optical products. During hot-embossing, it, however, is difficult to detect the microprism and microlens heights on macro surface. Hence, an optical sensing is proposed according to energy consumption as light passing through the hot-embossed two-level microstructures. The objective is to in-process recognize the two-level micro-formed sizes. In order to depict the nonlinearity between optical-sensing and micro-forming heights, the Na?ve Bayes method (NB) and artificial neural network (ANN) were employed to distinguish the two-level heights based on the processed experiments. It is shown that the green light responds to micro-forming heights best by illumination gradients. Theoretically and experimentally, the denser microlens array is more sensitive than the microprism array. By rapidly updating the database with illumination, process variables and micro-forming heights in the small volume, the NB recognizes two-level microstructure sizes more accurately than the ANNs for efficient production.
NSTL
Elsevier
