In order to explore the interaction mechanism between femtosecond laser and diamond,this study,fo-cusing on single crystal diamond prepared by chemical vapor deposition method,based on COMSOL Multiphysic simulation software,the energy conservation formula and Fourier heat conduction theorem formula were used to establish a simulation model of femtosecond laser processing single crystal diamond based on temperature field.The influence law of four influencing factors,including laser average power,laser scanning speed,laser repetition rate,and effective number of laser pulses,on the width and depth morphology of diamond flow channels was stud-ied.And a femtosecond laser processing experimental platform was built,and the test results were compared with the simulation results.The results show that the femtosecond laser multi-pulse processing of diamond was divided into three stages:weak ablation graphitization stage,strong ablation gasification stage and stable stage.The opti-mal processing parameters for femtosecond laser system was obtained:average power(Pavg)was 5-10 W,repeti-tion rate(f)was 50-200 kHz,positive focus,spot overlap rate was 63%-85%,and minimum pulse width.
关键词
单晶金刚石/飞秒激光烧蚀/温度场
Key words
single crystal diamond/femtosecond laser ablation/temperature field
维普
万方数据