To provide high-precision internal clocks for microprocessor chips,a high-precision resistance-capacitance(RC)oscillator circuit was designed based on 110 nm CMOS process.By introdu-cing a coarse adjustment circuit for charging and discharging current,a fine tuning circuit for reference voltage and a temperature coefficient adjustment circuit into the oscillator structure,effective compensa-tion for process deviation,voltage sensitivity and temperature sensitivity of the oscillator circuit was realized.The fine tuning circuit extracts proportional coefficients which are independent of voltage,process and temperature as frequency adjustment factors.Through reasonable matching,the temperature coefficient adjustment circuit ensures that the resistance at room temperature is not affected by gear changes,improving the temperature coefficient and frequency stability during gear adjustment.The chip test result shows that after triple correction of coarse tuning,fine tuning and temperature coefficient adjustment,the typical output frequency of the oscillator is 8 MHz,and the frequency change within the full temperature range of-40-150 ℃ is less than±0.5%.Therefore,the compensation for process deviation,voltage sensitivity and temperature sensitivity of the RC oscillator circuit is realized.
high-precisionresistance-capacitance(RC)oscillatorvoltage coefficient adjustmenttemperature compensationCMOS process