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Hot-carrier effects on irradiated deep submicron NMOSFET

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We investigate how γ exposure impacts the hot-carrier degradation in deep submicron NMOSFET with different technologies and device geometries for the first time.The results show that hot-carrier degradations on irradiated devices are greater than those without irradiation,especially for narrow channel device.The reason is attributed to charge traps in STI,which then induce different electric field and impact ionization rates during hotcarrier stress.

γ ray irradiationdeep submicronhot-carrier effect

Cui Jiangwei、Zheng Qiwen、Yu Xuefeng、Cong Zhongchao、Zhou Hang、Guo Qi、Wen Lin

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Key Laboratory of Functional Materials and Devices Under Special Environments, Chinese Academy of Sciences, Xinjiang Key Laboratory of Electric Information Materials and Devices, Xinjiang Technical Institute of Physics & Chemistry, Chinese Academy of Sciences, Urumuqi 830011, China

University of Chinese Academy of Sciences, Beijing 100049, China

2014

半导体学报(英文版)
中国电子学会和中国科学院半导体研究所

半导体学报(英文版)

CSTPCDCSCDEI
影响因子:0.36
ISSN:1674-4926
年,卷(期):2014.35(7)
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