首页|First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer

First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer

扫码查看
Currently,the preparation of large-size and high-quality hexagonal boron nitride is still an urgent problem.In this study,we investigated the growth and diffusion of boron and nitrogen atoms on the sapphire/h-BN buffer layer by first-prin-ciples calculations based on density functional theory.The surface of the single buffer layer provides several metastable adsorp-tion sites for free B and N atoms due to exothermic reaction.The adsorption sites at the ideal growth point for B atoms have the lowest adsorption energy,but the N atoms are easily trapped by the N atoms on the surface to form N-N bonds.With the in-creasing buffer layers,the adsorption process of free atoms on the surface changes from exothermic to endothermic.The diffu-sion rate of B atoms is much higher than that of the N atoms thus the B atoms play a major role in the formation of B-N bonds.The introduction of buffer layers can effectively shield the negative effect of sapphire on the formation of B-N bonds.This makes the crystal growth on the buffer layer tends to two-dimensional growth,beneficial to the uniform distribution of B and N atoms.These findings provide an effective reference for the h-BN growth.

hexagonal boron nitridebuffer layerfirst-principles calculationsmolecular dynamics

Jianyun Zhao、Xu Li、Ting Liu、Yong Lu、Jicai Zhang

展开 >

College of Mathematics and Physics,Beijing University of Chemical Technology,Beijing 100029,China

State Key Laboratory of Chemical Resource Engineering,Beijing University of Chemical Technology,Beijing 100029,China

618740071207402841820462019JZZY0102092020B010172001buctrc201802buctrc201830buctrc202127

2021

半导体学报(英文版)
中国电子学会和中国科学院半导体研究所

半导体学报(英文版)

CSTPCDCSCDEI
影响因子:0.36
ISSN:1674-4926
年,卷(期):2021.42(8)
  • 27