首页|Expansion of Metasurface Technology:Exploring Picophotonics in Optical Precision Metrology
Expansion of Metasurface Technology:Exploring Picophotonics in Optical Precision Metrology
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With the progression of photolithography processes,the present technology nodes have attained 3 nm and even 2 nm,necessitating a transition in the precision standards for displacement measurement and alignment methodologies from the nanometer scale to the sub-nanometer scale.Metasurfaces,owing to their superior light field manipulation capabilities,exhibit significant promise in the domains of displacement measurement and positioning,and are anticipated to be applied in the advanced alignment systems of lithography machines.This paper primarily provides an overview of the contemporary alignment and precise displacement measurement technologies employed in photolithography stages,alongside the operational principles of metasurfaces in the context of precise displacement measurement and alignment.Furthermore,it explores the evolu-tion of metasurface systems capable of achieving nano/sub-nano precision,and identifies the criti-cal issues associated with sub-nanometer measurements using metasurfaces,as well as the principal obstacles encountered in their implementation within photolithography stages.The objective is to provide initial guidance for the advancement of photolithography technology.
State Key Laboratory for Extreme Photonics and Instrumentation,College of Optical Science and Engineering,Intelligent Optics and Photonics Research Center,Jiaxing Research Institute,ZJU-Hangzhou Global Scientific and Technological Innovation Center,International Research Cen-ter for Advanced Photonics,Zhejiang University,Hangzhou 310027,China
School of Instrument and Electronics,North University of China,Taiyuan 030051,China
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