Multi-Physical Fields Coupling Simulation and Analysis of MEMS Electromagnetic Actuation Mechanism
In order to solve the problem that the interaction between the multi-physical fields of the electromag-netic actuation mechanism is unknown,an electromagnetic-structural multi-physical fields coupling model is es-tablished,and the driving characteristics of the microelectromechanical system(MEMS)electromagnetic actua-tion mechanism are simulated.Firstly,the voltage is used as the excitation source,and the magnetic vector po-tential is introduced as the dependent variable to obtain the overall magnetic field distribution of the driver and realize the electromagnetic field coupling.Then,the electromagnetic force of the slider is obtained by the Max-well stress tensor method,and applied as a load on the slider for transient dynamic analysis to realize the elec-tro magnetic-structural field coupling,so as to realize the multi-physical fields coupling simulation of the elec-tromagnetic actuation mechanism.Finally,the driving characteristics of electromagnetic actuation mechanism under different input conditions are further studied.The variation rales of different output conditions such as re-sponse time,displacement velocity,maximum electromagnetic force and displacement are clarified.The influ-ence of voltage on driving characteristics is analyzed,which provides guidance for the design and driving char-acteristics study of MEMS electromagnetic actuation mechanism.
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