FeN film with different thickness was prepared by RF magnetron sputtering at room temperature,and the effect of thickness on microstructure and magnetic properties was analyzed.The results show that the FeN films prepared at room temperature show obvious amorphous or nano-crystalline,and there is no FeN crystalline phase.With increasing film thickness the coercivity first increases and then decreases.When the thickness of sample is 40 nm,it has obvious soft magnetic properties,and the sample shows obvious in-plane uniaxial magnetic anisotropy under the induction of external field.When the thickness is 80 nm,stripe domains appears on the surface of the sample,showing weak perpendicular magnetic anisotropy.When the thickness is 120 nm,180 nm and 240 nm,the sample gradually presents a labyrinth domain structure.The magnetic spectrum of 40 nm and 80 nm sample show that the natural resonance frequency of 40 nm thick FeN film is 2 GHz and the 80 nm thick FeN film has multi resonance peaks.After annealing at 430 ℃ for 5 h in vacuum,it is found that all samples show obvious crystallization,mainly including γ'-Fe4N and ε-Fe3N phase,in which the sample with thickness of 120 nm has relatively pure polycrystalline γ'-Fe4N phase.
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