Ta(2 nm)/Pt(20 nm)[Co(t)/Pt(0.5 nm)]4/Pt(1.5 nm)magnetic multilayers were deposited on 100 μm thick polyvinylidene fluoride(PVDF),polyimide(PI)and Si substrates by DC magnetron sputtering method.The influence of Co layer thickness and rigid Si,flexible PVDF and PI substrates on perpendicular magnetic anisotropy of Co/Pt multilayers were investigated.The results indicate that perpendicular magnetic anisotropy of Co/Pt multilayers decreases with the increase of Co thickness,and the magnetic domain size decreases with the increase of Co thickness.By comparing the magnetic anisotropy constant,coercivity and magnetic domain size of Co/Pt multilayers grown on rigid and flexible substrates,it is found that the prepared flexible Co/Pt multilayers still maintain excellent perpendicular magnetic anisotropy,and their perpendicular magnetic anisotropy is similar to that grown on rigid substrate.
Co/Pt multilayersCo layer thicknessperpendicular magnetic anisotropyflexible substratemagnetic domain
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维普
