Ni80Fe20 soft magnetic thin films with length of 5 mm,strip spacing of 30 μm and strip width of 20～140 μm were prepared on 5×5 mm2 Si-substrate by electron beam evaporation and lithography.The effect of strip width on the static and dynamic magnetic properties of Ni80Fe20 thin films was studied.The results show that the in-plane coercivity and anisotropy field of the films decrease with the increase of the strip width,and the anisotropy field decreases from 235 Oe to 131 Oe.The resonance frequency fr of the film increases from 0.75 GHz of the continuous film to 2.81 GHz when the strip width is 20 μm,and the initial permeability is more than 350.NiFe films with high permeability and high resonance frequency were prepared.
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