短脉冲激光加工微结构及其成型技术研究
Study on Microstructure Formation and Its Processing Technology in Short Pulse Laser Micromachining
虞宙 1崔金晔 2胡俊 3姜振华3
作者信息
- 1. 东华大学 人工智能研究院,上海 201620;上海市高性能纤维复合材料协同创新中心,上海 201620
- 2. 东华大学 机械工程学院,上海 201620
- 3. 东华大学 人工智能研究院,上海 201620
- 折叠
摘要
短脉冲激光具有高精度、非接触和高可控性等优点,可以针对各种材料进行表面精细加工.如在医用钛合金表面加工出不同形貌、尺寸的微结构,能够有效地改善植入物表面生物活性.利用短脉冲激光在材料加工上的优势,开展了纳秒激光脉冲烧蚀试验,探究纳秒激光与钛合金间的相互作用.阐明钛合金表面火山坑微结构的形成机理,并开展多脉冲激光参数试验,研究激光参数对微结构成型的影响,建立参数与特征尺寸间的映射关系.该研究可以获得具有特定尺寸、高加工质量的微结构,有助于短脉冲激光微加工技术的应用,具有良好的学术和工程意义.
Abstract
The short pulse laser is a research focus due to its high precision,non-contact and high controllability advantages.In this paper,nanosecond laser pulse ablation experiments on the titanium alloy surface were conducted to explore the interaction between nanosecond laser and titanium alloy.The formation mechanism of a volcano-like pit under the combined influence of surface tension,the Marangoni effect and recoil pressure was clarified and verified.Thereafter,a multi-pulse laser parameter experiment was carried out.Ablation morphology,quality and feature sizes of the volcano-like pit and micro-groove were studied under different laser parameters.Thus,the correlation between laser parameters and feature sizes was built.This study contributes to micromachining technology with nanosecond laser,which suggests that micro-pit and micro-groove with specific sizes and high processing quality can be obtained.
关键词
短脉冲激光/微加工/火山状坑/微沟槽Key words
short pulse laser/micromachining/volcano-like pit/micro-groove引用本文复制引用
基金项目
National Natural Science Foundation of China(52205453)
Natural Science Foundation of Shanghai,China(22ZR1402700)
Opening Foundation of Shanghai Collaborative Innovation Center of High Performance Fibers and Composites(Province-Minitry Joint)(X12812101/019)
出版年
2024
国家科技期刊平台
NSTL
万方数据