首页|金刚石线切割单晶硅制绒研究进展

金刚石线切割单晶硅制绒研究进展

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对常用的几种单晶硅片制绒技术,如添加剂辅助碱液刻蚀制绒工艺、酸液刻蚀制绒工艺、金属离子催化的化学制绒以及表面预处理(热处理、机械抛光和电化学预处理)叠加碱液刻蚀制绒工艺等进行了介绍.并对不同工艺的制绒原理、技术特点和应用情况等进行了对比分析,认为添加剂辅助碱液刻蚀制绒工艺应用较多;热处理叠加碱液刻蚀制绒工艺相较于其他制绒工艺,可减少溶液消耗、硅料消耗和简化工艺处理步骤等,可实现降低晶体硅太阳电池制造成本及硅片薄片化的目的.
Research progress on diamond wire sawn monocrystalline silicon texturing
This paper introduces several common texturing techniques for monocrystalline silicon wa-fers,including additive-assisted alkaline etching,acidic etching,metal ion-catalyzed chemical textur-ing,and surface pretreatment(thermal treatment,mechanical polishing,and electrochemical pre-treatment)combined with alkaline etching.The texturing principles,technical characteristics,and ap-plication situations of these different processes are compared and analyzed.The comparative analysis indicates that the additive-assisted alkaline etching process is widely applied.The thermal treatment combined with alkaline etching process,compared to other texturing techniques,can reduce the con-sumption of chemical solutions and silicon material,and simplify process steps,thus achieving the goals of reducing the manufacturing cost of crystalline silicon solar cells and facilitating the thinning of silicon wafers.

diamond wire sawmonocrystalline silicon waferstexturing processheat treatment

黄虎一雄、李杰、章金兵、王旭生

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浙江理工大学材料科学与工程学院,浙江 杭州 310018

浙大宁波理工学院材料科学与工程学院,浙江宁波 315100

金刚石线切割 单晶硅片 制绒工艺 热处理

2025

电源技术
中国电子科技集团第十八研究所

电源技术

北大核心
影响因子:0.329
ISSN:1002-087X
年,卷(期):2025.49(1)